This document describes a digital twin for monitoring and controlling the semiconductor ingot growthprocess. The use case is analysed and designed using the ISO 23247 series. The result is a systematic view of the use case implementation and a high-level design of the digital twins, which can be directly implemented using the readily available tools and languages, including those supported by the relevant standards.

Product Details

Published:

05/30/2025

ISBN(s):

9780539341966

Number of Pages:

24

File Size:

1 file , 3.1 MB

Product Code(s):

30503372, 30503372, 30503372

Note:

This product is restricted and cannot be purchased in the following countries Ukraine, Russia, Belarus